01101nam 2200337 450 99628070190331620230814235032.01-5386-4782-6(CKB)4330000000525947(WaSeSS)IndRDA00122336(EXLCZ)99433000000052594720200425d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 IEEE Micro Electro Mechanical Systems 21-25 January 2018, Belfast, UK /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (65 pages)1-5386-4783-4 ElectronicsCongressesElectronics621.381Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962807019033162018 IEEE Micro Electro Mechanical Systems2537059UNISA