01394nam 2200385 450 99628053920331620230814230250.01-5386-5273-0(CKB)4100000007192347(WaSeSS)IndRDA00121865(EXLCZ)99410000000719234720200414d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems 22-26 April 2018, Singapore /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (97 pages)1-5386-5274-9 Nanoelectromechanical systemsCongressesMicroelectromechanical systemsCongressesNanostructured materialsCongressesNanoelectromechanical systemsMicroelectromechanical systemsNanostructured materials620.5Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962805392033162018 IEEE 13th Annual International Conference on Nano2527741UNISA