01166nam 2200361 450 99628036270331620230814225851.01-5386-5717-1(CKB)4100000007125737(WaSeSS)IndRDA00121520(EXLCZ)99410000000712573720200403d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 31st International Vacuum Nanoelectronics Conference 9-13 July 2018, Kyoto, Japan /American Vacuum SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (148 pages)1-5386-5718-X Vacuum technologyCongressesMicroelectronicsCongressesVacuum technologyMicroelectronics621.55American Vacuum Society,WaSeSSWaSeSSPROCEEDING9962803627033162018 31st International Vacuum Nanoelectronics Conference2543578UNISA