01267nam 2200361 450 99627993040331620230814224308.01-5090-6374-9(CKB)4100000006459884(WaSeSS)IndRDA00122702(EXLCZ)99410000000645988420200507d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 International Conference on Optical MEMS and Nanophotonics 29 July-2 August 2018, Lausanne, Switzerland /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (133 pages)1-5090-6375-7 Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621.381Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962799304033162018 International Conference on Optical MEMS and Nanophotonics2513209UNISA