01265nam 2200385 450 99627989050331620230803043432.0(CKB)4340000000004368(WaSeSS)IndRDA00119777(EXLCZ)99434000000000436820200309d2013 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2013 Transducers & Eurosensors XXVII The 17th international conference on solid-state sensors, Actuators and Microsystems : 16-20 June 2013, Barcelona, Spain /IEEE Electron Devices SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2013.1 online resource (65 pages)1-4673-5983-1 1-4673-5982-3 DetectorsCongressesActuatorsCongressesTransducersCongressesDetectorsActuatorsTransducers681.2IEEE Electron Devices Society,WaSeSSWaSeSSPROCEEDING9962798905033162013 Transducers & Eurosensors XXVII2534816UNISA