01871nam 2200397 450 99627983860331620230425160253.01-5090-3416-1(CKB)3710000001361586(NjHacI)993710000001361586(EXLCZ)99371000000136158620230425d2016 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) /Institute of Electrical and Electronics Engineers (IEEE)Piscataway, New Jersey :Institute of Electrical and Electronics Engineers (IEEE),2016.1 online resource (various pagings) illustrations1-5090-3417-X BALD 2016 will provide possibilities to publish results of recent studies on atomic layer deposition (ALD) and to initiate and support collaboration between research groups working in this field and applications from advanced electronics, microsystems, and displays to energy capture and storage, solid state lighting, biotechnology, security, and consumer products particularly for any advanced technologies that require control of film structure in the nanometer or sub nanometer scale.2016 14th International Baltic Conference on Atomic Layer Deposition Atomic layer depositionAtomic layer depositionCongressesElectronicsCongressesAtomic layer deposition.Atomic layer depositionElectronics621.381NjHacINjHaclPROCEEDING9962798386033162016 14th International Baltic Conference on Atomic Layer Deposition (BALD)2498660UNISA