01664nam 2200409 450 99627974730331620230613062459.01-4673-6835-0(CKB)3880000000021550(NjHacI)993880000000021550(EXLCZ)99388000000002155020230613d2015 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierOptical MEMS and Nanophotonics (OMN) 2015 International Conference on /Institute of Electrical and Electronics EngineersPiscataway :IEEE,2015.1 online resource (xxiii, 158 pages) illustrations (some color)1-4673-6836-9 1-4673-6834-2 Optical MEMS and nanophotonics describes actuators and structures interacting with light for manipulation in applications and fields such as sensing, telecom, imaging, and bio engineering, creating microlenses, diffractive elements, displays, micromirrors, subwavelength optics, and more.2015 International Conference on Optical MEMS and Nanophotonics 2015 International Conference on Optical MEMS and Nanophotonics (OMN)Optical MEMS and Nanophotonics Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621NjHacINjHaclPROCEEDING996279747303316Optical MEMS and Nanophotonics (OMN)3380762UNISA