01543nam 2200421 450 99627974600331620231020224145.01-4799-1156-9(CKB)3390000000045257(NjHacI)993390000000045257(EXLCZ)99339000000004525720231020d2013 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrierOptical MEMS and Nanophotonics (OMN), 2013 International Conference on /International Conference on Optical MEMS and Nanophotonics, IEEE Photonics Society, Institute of Electrical and Electronics EngineersPiscataway, NJ :IEEE,2013.1 online resource1-4799-1155-0 1-4799-1512-2 2013 International Conference on Optical MEMS and Nanophotonics 2013 International Conference on Optical MEMS and Nanophotonics (OMN)Optical MEMS and Nanophotonics Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621.381IEEE Photonics Society,Institute of Electrical and Electronics Engineers,NjHacINjHaclPROCEEDING996279746003316Optical MEMS and Nanophotonics (OMN), 2013 International Conference on2546989UNISA