01478nas 22004453a 450 99627974310331620200916054159.72160-5041(OCoLC)488386593(CKB)2550000000030548(CONSER)--2011200084(EXLCZ)99255000000003054820091213b20072009 --- aengurmn|||||||||txtrdacontentcrdamediacrrdacarrierIEEE/LEOS International Conference on Optical MEMS and Nanophotonics [proceedings]Piscataway, N.J. IEEE2160-5033 Optical MEMS and NanophotonicsInternational Conference on Optical MEMS and NanophotonicsIEEE/LEOS Int. Conf. Opt. MEMS NanophotonicsMicroelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsfast(OCoLC)fst01019745Nanophotonicsfast(OCoLC)fst01744190Periodicals.fastConference papers and proceedings.fastMicroelectromechanical systemsNanophotonicsMicroelectromechanical systems.Nanophotonics.621Institute of Electrical and Electronics Engineers.CONFERENCE996279743103316IEEE878179UNISA