00798nam0-22003251i-450-990003000130403321000300013FED01000300013(Aleph)000300013FED0100030001320000920d1988----km-y0itay50------baitaIT1988-1992Scenari per l'economiaa cura del FOR.1. ed.MilanoIl Sole 24 Ore1988.109 p.20 cmStudi e convegniF/4O/1.1FORITUNINARICAUNIMARCBK990003000130403321O/1.1 MIL6729SESO/1.1 MIL8460SESSES1988-1992466040UNINAING0101356oam 2200349z- 450 99627973300331620090620090349.01-5090-8215-8(CKB)1000000000331798(EXLCZ)99100000000033179820220614c2007uuuu -u- -eng15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /IEEE Electron Devices SocietyIEEE1-4244-1227-7 1-4244-1228-5 2007 15th International Conference on Advanced Thermal Processing of SemiconductorsComputer and Automation Engineering SemiconductorsHeat treatmentCongressesRapid thermal processingCongressesSemiconductor dopingCongressesSemiconductorsDefectsCongressesSemiconductorsHeat treatmentRapid thermal processingSemiconductor dopingSemiconductorsDefects621.3815/2IEEE Electron Devices Society.PROCEEDING99627973300331615th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 20072871341UNISA