01356oam 2200349z- 450 99627973300331620090620090349.01-5090-8215-8(CKB)1000000000331798(EXLCZ)99100000000033179820220614c2007uuuu -u- -eng15th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2007 October 2-5, 2007, Grand Hotel Baia Verde, Catania, Italy /IEEE Electron Devices SocietyIEEE1-4244-1227-7 1-4244-1228-5 2007 15th International Conference on Advanced Thermal Processing of SemiconductorsComputer and Automation Engineering SemiconductorsHeat treatmentCongressesRapid thermal processingCongressesSemiconductor dopingCongressesSemiconductorsDefectsCongressesSemiconductorsHeat treatmentRapid thermal processingSemiconductor dopingSemiconductorsDefects621.3815/2IEEE Electron Devices Society.PROCEEDING99627973300331615th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 20072871341UNISA