01287nam 2200337 450 99627959170331620230814223113.01-5386-5881-X(CKB)4100000005061540(WaSeSS)IndRDA00122966(EXLCZ)99410000000506154020200511d2018 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design 18-22 April 2018, Lviv, Ukraine /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2018.1 online resource (90 pages)1-5386-5882-8 Microelectromechanical systemsDesign and constructionCongressesMicroelectromechanical systemsDesign and construction621.381Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962795917033162018 XIV-th International Conference on Perspective Technologies and Methods in MEMS Design2544684UNISA