00667oam 2200205z- 450 996279440803316(CKB)3460000000126505(EXLCZ)99346000000012650520220628c2013uuuu -u- -eng2013 IEEE International 3D Systems Integration Conference (3DIC)IEEE1-4673-6482-7 1-4673-6484-3 2013 IEEE International 3D Systems Integration Conference 3D Systems Integration Conference PROCEEDING9962794408033162013 IEEE International 3D Systems Integration Conference (3DIC)2539018UNISA