01189nam 2200361 450 99627936330331620230807213129.01-4799-8591-0(CKB)3710000000997003(WaSeSS)IndRDA00120215(EXLCZ)99371000000099700320200312d2015 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier2015 XVIII AISEM Annual Conference 3-5 February 2015, Trento, Italy /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2015.1 online resource (105 pages)1-4799-8592-9 Microelectromechanical systemsCongressesDetectorsCongressesMicroelectromechanical systemsDetectors621.381Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSPROCEEDING9962793633033162015 XVIII AISEM Annual Conference2514473UNISA