02257nas 2200529-a 450 99627833920331620240413030035.0(CKB)991042732804622(CONSER)---99103062-(IEEE)1000654(EXLCZ)9999104273280462219980613b1997200u --- aengtxtrdacontentcrdamediacrrdacarrierIEEE International Symposium on Semiconductor Manufacturing conference proceedingsPiscataway, N.J. Institute of Electrical and Electronics Engineersc1997-1 online resourcePrint version: IEEE International Symposium on Semiconductor Manufacturing conference proceedings. 1523-553X (DLC) 99103062 (OCoLC)39283054 SemiconductorsDesign and constructionCongressesSemiconductor industryProduction controlCongressesSemiconductor industryManagementCongressesProcess controlCongressesProcess controlfast(OCoLC)fst01078020Semiconductor industryManagementfast(OCoLC)fst01112154Semiconductor industryProduction controlfast(OCoLC)fst01112157SemiconductorsDesign and constructionfast(OCoLC)fst01112213Conference papers and proceedings.fastSemiconductorsDesign and constructionSemiconductor industryProduction controlSemiconductor industryManagementProcess controlProcess control.Semiconductor industryManagement.Semiconductor industryProduction control.SemiconductorsDesign and construction.621.3815/2IEEE Electron Devices Society.Ultra Clean Society.Semiconductor Equipment and Materials International.Components, Packaging & Manufacturing Technology Society.CONFERENCE996278339203316exl_impl conversionIEEE International Symposium on Semiconductor Manufacturing conference proceedings1888714UNISA