01246oam 2200373zu 450 99621843230331620210807003333.0(CKB)111026746704768(SSID)ssj0000558518(PQKBManifestationID)12198047(PQKBTitleCode)TC0000558518(PQKBWorkID)10566155(PQKB)10408758(EXLCZ)9911102674670476820160829d1992 uy engtxtccrIEEE Micro Electro Mechanical Systems, 1992[Place of publication not identified]IEEE1992Bibliographic Level Mode of Issuance: Monograph0-7803-0497-7 620.4Benecke W(Wolfgang)1232096Petzold H.-C(Hans-Christian)1232097IEEE Robotics and Automation Society.Institute of Electrical and Electronics Engineers.German Section.IEEE Workshop on Micro Electro Mechanical Systems(1992 :Travemünde, Lübeck, Germany)PQKBBOOK996218432303316IEEE Micro Electro Mechanical Systems, 19922860786UNISA