01148oam 2200385zu 450 99621770090331620210807003404.0(CKB)111055184252416(SSID)ssj0000454449(PQKBManifestationID)12173447(PQKBTitleCode)TC0000454449(PQKBWorkID)10397595(PQKB)10981991(NjHacI)99111055184252416(EXLCZ)9911105518425241620160829d2001 uy engur|||||||||||txtccr2001 IEEE International Conference on Plasma Science[Place of publication not identified]I E E E20011 online resource illustrationsBibliographic Level Mode of Issuance: Monograph0-7803-7141-0 Includes bibliographical references.Plasma chemistryPlasma chemistry.541.0PQKBPROCEEDING9962177009033162001 IEEE International Conference on Plasma Science2529995UNISA