01251oam 2200289z- 450 99621738540331620200413180440.00-7803-3976-2(CKB)111026746719436(EXLCZ)9911102674671943620121017c1998uuuu -u- -engMAM '97, abstracts booklet European Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997Integrated circuitsVery large scale integrationDesign and constructionCongressesMetallizingCongressesSemiconductor-metal boundariesCongressesIntegrated circuitsVery large scale integrationDesign and constructionCongresses.MetallizingCongresses.Semiconductor-metal boundariesCongresses.621.39/5International Union for Vacuum Science, Technique and Applications.France.Ministère de l'éducation nationale, de l'enseignement supérieur, de la recherche et de l'insertion professionnelle.IEEE Electron Devices Society.PROCEEDING996217385403316MAM '97, abstracts booklet2860437UNISA