01348oam 2200409zu 450 99621733240331620210807003444.0(CKB)111026746729638(SSID)ssj0000454779(PQKBManifestationID)12175348(PQKBTitleCode)TC0000454779(PQKBWorkID)10397727(PQKB)11748221(EXLCZ)9911102674672963820160829d2001 uy engtxtccr2000 International Conference on Ion Implantation Technology[Place of publication not identified]I E E E2001Bibliographic Level Mode of Issuance: Monograph0-7803-6462-7 Electrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied Sciences621.3815/2Ryssel Heiner1941-1229555Institute of Electrical and Electronics Engineers.PQKBPROCEEDING9962173324033162000 International Conference on Ion Implantation Technology2854057UNISA