01365oam 2200397zu 450 99621714810331620210807003440.0(CKB)111026746728512(SSID)ssj0000454774(PQKBManifestationID)12173463(PQKBTitleCode)TC0000454774(PQKBWorkID)10399124(PQKB)10699413(EXLCZ)9911102674672851220160829d2000 uy engtxtccr2000 International Conference on Simulation of Semiconductor Processes and Devices[Place of publication not identified]IEEE2000Bibliographic Level Mode of Issuance: Monograph0-7803-6279-9 Electrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied Sciences621.3815/2/015118IEEE, Institute of Electrical and Electronics Engineers, Inc. StaffPQKBPROCEEDING9962171481033162000 International Conference on Simulation of Semiconductor Processes and Devices2518205UNISA