01950oam 2200505zu 450 99621684170331620210807003420.0(CKB)111055184256742(SSID)ssj0000393514(PQKBManifestationID)12111399(PQKBTitleCode)TC0000393514(PQKBWorkID)10363643(PQKB)10074158(EXLCZ)9911105518425674220160829d2002 uy engtxtccr10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada[Place of publication not identified]IEEE2002Bibliographic Level Mode of Issuance: Monograph0-7803-7465-7 SemiconductorsHeat treatmentCongressesRapid thermal processingDefectsCongressesSemiconductor dopingCongressesSemiconductorsCongressesElectrical EngineeringHILCCElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCSemiconductorsHeat treatmentRapid thermal processingDefectsSemiconductor dopingSemiconductorsElectrical EngineeringElectrical & Computer EngineeringEngineering & Applied SciencesGelpey Jeffrey CIEEE Electron Devices SocietyInternational Conference on Advanced Thermal Processing of SemiconductorsPQKBPROCEEDING99621684170331610th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada2500993UNISA