01248nam 2200397 450 99621598030331620180321082218.0(CKB)3460000000003674(WaSeSS)IndRDA00095905(EXLCZ)99346000000000367420180321d2011 || |engur|||||||||||txtrdacontentcrdamediacrrdacarrier25th European Mask and Lithography Conference 12-15 January 2009Frankfurt am Main, Germany :VDE,2011.1 online resource (135 pages)0-8194-7770-2 3-8007-3154-1 MicrolithographyCongressesIntegrated circuitsMasksCongressesMicrolithographyIntegrated circuitsMasks621.3815Behringer Uwe F. W1239199VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik.BACUS (Technical group)SPIE (Society)WaSeSSWaSeSSPROCEEDING99621598030331625th European Mask and Lithography Conference2877138UNISA