01368oam 2200433zu 450 99621569490331620210807004551.01-4673-1137-51-4673-1136-7(CKB)3420000000000564(SSID)ssj0000781187(PQKBManifestationID)12277294(PQKBTitleCode)TC0000781187(PQKBWorkID)10804244(PQKB)10414962(NjHacI)993420000000000564(EXLCZ)99342000000000056420160829d2012 uy engur|||||||||||txtccr2012 IEEE International Interconnect Technology Conference[Place of publication not identified]IEEE20121 online resourceBibliographic Level Mode of Issuance: Monograph1-4673-1138-3 Metal oxide semiconductors, ComplementaryInterconnects (Integrated circuit technology)Metal oxide semiconductors, Complementary.Interconnects (Integrated circuit technology)621.3815IEEE StaffPQKBPROCEEDING9962156949033162012 IEEE International Interconnect Technology Conference2533596UNISA