01360oam 2200421zu 450 99621569440331620210807004557.01-4673-1164-2(CKB)3420000000000569(SSID)ssj0000781124(PQKBManifestationID)12343752(PQKBTitleCode)TC0000781124(PQKBWorkID)10821812(PQKB)10174607(NjHacI)993420000000000569(EXLCZ)99342000000000056920160829d2012 uy engur|||||||||||txtccr2012 70th Annual Device Research Conference[Place of publication not identified]IEEE20121 online resource (278 pages)Bibliographic Level Mode of Issuance: Monograph1-4673-1163-4 Microelectromechanical systemsReliabilityCongressesMicroelectromechanical systemsDesign and constructionCongressesMicroelectromechanical systemsReliabilityMicroelectromechanical systemsDesign and construction621.381ieeePQKBPROCEEDING9962156944033162012 70th Annual Device Research Conference2524788UNISA