01278oam 2200409zu 450 99621402820331620210807003051.01-4244-3816-01-4244-3815-2(CKB)1000000000709916(SSID)ssj0000453007(PQKBManifestationID)12171159(PQKBTitleCode)TC0000453007(PQKBWorkID)10473233(PQKB)11729119(NjHacI)991000000000709916(EXLCZ)99100000000070991620160829d2009 uy engur|||||||||||txtccr2009 17th International Conference on Advanced Thermal Processing of Semiconductors[Place of publication not identified]I E E E20091 online resource (216 pages) illustrationsBibliographic Level Mode of Issuance: Monograph1-4244-3814-4 Semiconductor dopingCongressesSemiconductor doping004.6IEEE StaffPQKBPROCEEDING9962140282033162009 17th International Conference on Advanced Thermal Processing of Semiconductors2501864UNISA