01170oam 2200373zu 450 99621272160331620210807003343.0(CKB)111085500352348(SSID)ssj0000454097(PQKBManifestationID)12155042(PQKBTitleCode)TC0000454097(PQKBWorkID)10482416(PQKB)10981379(EXLCZ)9911108550035234820160829d2004 uy engtxtccr2004 IEEE/Semi Advanced Semiconductor Manufacturing Conference and Workshop[Place of publication not identified]I E E E2004Bibliographic Level Mode of Issuance: Monograph0-7803-8312-5 Electrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCElectrical & Computer EngineeringEngineering & Applied SciencesElectrical EngineeringPQKBPROCEEDING9962127216033162004 IEEE2243003UNISA