02074oam 2200493zu 450 99621259770331620210807003352.0(CKB)111026746721692(SSID)ssj0000455126(PQKBManifestationID)12149096(PQKBTitleCode)TC0000455126(PQKBWorkID)10398744(PQKB)11591856(EXLCZ)9911102674672169220160829d1998 uy engtxtccrThe Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany[Place of publication not identified]Institute of Electrical and Electronics Engineers1998Bibliographic Level Mode of Issuance: Monograph0-7803-4412-X Microelectromechanical systemsCongressesDetectorsCongressesMicroactuatorsCongressesElectrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCMicroelectromechanical systemsCongressesDetectorsCongressesMicroactuatorsCongressesElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied Sciences621.3American Society of Mechanical Engineers Dynamic Systems and Control Division,IEEE Robotics and Automation SocietyIEEE Workshop on Micro Electro Mechanical SystemsPQKBPROCEEDING996212597703316The Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : proceedings, January 25-29, 1998, Heidelberg, Germany2500896UNISA