01265oam 2200409zu 450 99621239450331620210807003658.01-4244-4193-5(CKB)2400000000003047(SSID)ssj0000452388(PQKBManifestationID)12194501(PQKBTitleCode)TC0000452388(PQKBWorkID)10468539(PQKB)10446100(NjHacI)992400000000003047(EXLCZ)99240000000000304720160829d2009 uy engur|||||||||||txtccr2009 International Solid-State Sensors, Actuators and Microsystems Conference[Place of publication not identified]I E E E20091 online resource (616 pages)Bibliographic Level Mode of Issuance: Monograph1-4244-4190-0 Includes bibliographical references and index.TransducersCongressesTransducers681.2IEEE StaffPQKBPROCEEDING9962123945033162009 International Solid-State Sensors, Actuators and Microsystems Conference2503961UNISA