01517nam 2200421 450 99621191850331620230421041101.0(CKB)111026746705918(SSID)ssj0000450653(PQKBManifestationID)12139841(PQKBTitleCode)TC0000450653(PQKBWorkID)10444460(PQKB)11393541(WaSeSS)IndRDA00123616(EXLCZ)9911102674670591820200524d1992 uy 0engur|||||||||||txtccrASMC '92 3rd Annual Advanced Semiconductor Manufacturing Conference and Workshop 1992 : September 30-October 1, 1992, Hyatt Regency, Cambridge, Massachusetts /sponsored by Institute of Electrical and Electronics Engineers [and three others]Piscataway, New Jersey :Institute of Electrical and Electronics Engineers,1992.1 online resource (205 pages)Bibliographic Level Mode of Issuance: Monograph0-7803-0740-2 Semiconductor industryCongressesSemiconductorsDesign and constructionCongressesSemiconductor industrySemiconductorsDesign and construction621.38152Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSBOOK996211918503316ASMC '922498554UNISA