01353nam 2200421 450 99621191450331620230421041024.0(CKB)111026746705992(SSID)ssj0000445256(PQKBManifestationID)12175670(PQKBTitleCode)TC0000445256(PQKBWorkID)10481134(PQKB)10887818(WaSeSS)IndRDA00119408(EXLCZ)9911102674670599220200303d1993 uy 0engur|||||||||||txtccrIVMC '93 sixth International Vacuum Microelectronics Conference : Newport, Rhode Island, July 12-15, 1993 : technical digest /IEEE Electron Devices SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,1993.1 online resource (40 pages)Bibliographic Level Mode of Issuance: Monograph0-7803-0852-2 MicroelectronicsCongressesVacuum technologyCongressesMicroelectronicsVacuum technology621.381IEEE Electron Devices Society,WaSeSSWaSeSSBOOK996211914503316IVMC '932528498UNISA