00727oam 2200217z- 450 9962116979033161-5090-8225-5(CKB)2400000000001689(EXLCZ)99240000000000168920220628c2007uuuu -u- -engSemiconductor Manufacturing, 2007. ISSM 2007. International Symposium onIEEE1-4244-1141-6 1-4244-1142-4 2007 International Symposium on Semiconductor ManufacturingBipolar/BiCMOS Circuits and Technology Meeting PROCEEDING996211697903316Semiconductor Manufacturing, 2007. ISSM 2007. International Symposium on2513733UNISA