01591oam 2200481zu 450 99621105030331620210807002634.01-5090-8272-7(CKB)1000000000331721(SSID)ssj0000395973(PQKBManifestationID)12102814(PQKBTitleCode)TC0000395973(PQKBWorkID)10460445(PQKB)10368374(EXLCZ)99100000000033172120160829d2007 uy engtxtccr2007 IEEE/IEOS International Conference on Optical MEMS and Nanophotonics : Hualien, Taiwan, 12-16 August, 2007[Place of publication not identified]IEEE2007Bibliographic Level Mode of Issuance: Monograph1-4244-0641-2 Microelectromechanical systemsCongressesOptical MEMSCongressesNanophotonicsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptical MEMSNanophotonicsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.36IEEE/LEOS International Conference on Optical MEMS and NanophotonicsPQKBPROCEEDING9962110503033162007 IEEE2346897UNISA