01682oam 2200445zu 450 99621015160331620210807003338.0(CKB)111085500352324(SSID)ssj0000395452(PQKBManifestationID)12118421(PQKBTitleCode)TC0000395452(PQKBWorkID)10455025(PQKB)10906223(EXLCZ)9911108550035232420160829d2004 uy engtxtccr17th IEEE International Conference on Micro Electro Mechanical Systems : Maastricht : MEMS 2004 technical digest : January 25-29, 2004[Place of publication not identified]IEEE2004Bibliographic Level Mode of Issuance: Monograph0-7803-8265-X Microelectromechanical systemsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.381Institute of Electrical and Electronics EngineersIEEE Robotics and Automation SocietyIEEE International Conference on Micro Electro Mechanical SystemsPQKBPROCEEDING99621015160331617th IEEE International Conference on Micro Electro Mechanical Systems : Maastricht : MEMS 2004 technical digest : January 25-29, 20042510877UNISA