01825nas 2200529-a 450 99620713830331620240413021450.0(DE-599)ZDB2117111-7(CKB)958480255682(CONSER)---93659127-(EXLCZ)9995848025568219931011b19922008 --- aengtxtrdacontentcrdamediacrrdacarrierMicrolithography worldPort Washington, N.Y. Penn Well Publication, published in cooperation with SPIE[1992]-20081 online resourceTitle from cover.Published: Tulsa, OK, Oct., Nov., Dec. 1993-Print version: Microlithography world. 1074-407X MICROLITHOGR WORLDMicrolithogr. worldSemiconductorsDesign and constructionPeriodicalsMicrolithographyPeriodicalsMasks (Electronics)PeriodicalsMasks (Electronics)fast(OCoLC)fst01011095Microlithographyfast(OCoLC)fst01019883SemiconductorsDesign and constructionfast(OCoLC)fst01112213MicrolithografiegttPeriodicals.fastPeriodicals.lcgftSemiconductorsDesign and constructionMicrolithographyMasks (Electronics)Masks (Electronics)Microlithography.SemiconductorsDesign and construction.Microlithografie.621.3815/31Society of Photo-optical Instrumentation Engineers.JOURNAL996207138303316exl_impl conversionMicrolithography world2189939UNISA