00953oam 2200337zu 450 99620629390331620210807003101.01-5090-7642-51-4244-1965-4(CKB)1000000000710904(SSID)ssj0000453424(PQKBManifestationID)12171822(PQKBTitleCode)TC0000453424(PQKBWorkID)10481207(PQKB)10498599(EXLCZ)99100000000071090420160829d2008 uy engtxtccr2008 IEEE/SEMI Advanced Semiconductor Manufacturing Conference[Place of publication not identified]I E E E2008Bibliographic Level Mode of Issuance: Monograph1-4244-1964-6 IEEE StaffPQKBPROCEEDING9962062939033162008 IEEE2416956UNISA