01273oam 2200433zu 450 99620629080331620210807003105.01-5090-7789-81-4244-1918-2(CKB)1000000000710926(SSID)ssj0000453436(PQKBManifestationID)12191006(PQKBTitleCode)TC0000453436(PQKBWorkID)10482448(PQKB)10943450(NjHacI)991000000000710926(EXLCZ)99100000000071092620160829d2008 uy engur|||||||||||txtccr2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics[Place of publication not identified]I E E E20081 online resourceBibliographic Level Mode of Issuance: Monograph1-4244-1917-4 Microelectromechanical systemsCongressesNanophotonicsCongressesMicroelectromechanical systemsNanophotonics621.381IEEE StaffPQKBPROCEEDING9962062908033162008 IEEE2416956UNISA