02205oam 2200553zu 450 99620624360331620210807000242.0(CKB)1000000000022826(SSID)ssj0000395510(PQKBManifestationID)12085001(PQKBTitleCode)TC0000395510(PQKBWorkID)10451607(PQKB)10014608(EXLCZ)99100000000002282620160829d2004 uy engtxtccrDigest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan[Place of publication not identified]Japan Society of Applied Physics2004Bibliographic Level Mode of Issuance: Monograph4-9902472-0-5 MicrofabricationVery large scale integrationDesign and constructionCongressesIntegrated circuitsCongressesLithographyCongressesNanotechnologyCongressesMicroelectronicsCongressesPhysicsHILCCPhysical Sciences & MathematicsHILCCAtomic PhysicsHILCCMicrofabricationVery large scale integrationDesign and constructionIntegrated circuitsLithographyNanotechnologyMicroelectronicsPhysicsPhysical Sciences & MathematicsAtomic Physics621.3815/31Oyo Butsuri GakkaiAmerican Vacuum SocietyIEEE Electron Devices SocietyInternational Microprocesses and Nanotechnology ConferencePQKBPROCEEDING996206243603316Digest of papers : Microprocesses and Nanotechnology 2004 : 2004 International Microprocesses and Nanotechnology Conference : October 26-29, 2004, conference (october 26 technical Seminar, 27-29 Conference) : Osaka, Japan2522489UNISA