01629oam 2200421zu 450 99620446890331620220919173954.0(CKB)111026746712734(SSID)ssj0000455396(PQKBManifestationID)12129504(PQKBTitleCode)TC0000455396(PQKBWorkID)10400460(PQKB)10152404(EXLCZ)9911102674671273420160829d1995 uy 0engtxtccrIEEE/SEMI 1995 Advanced Semiconductor Manufacturing Conference and Workshop theme, "Semiconductor manufacturing : economic solutions for the 21st century" : ASMC 95 proceedings, November 13-15, 1995, Cambridge, MA, USANew York :Institute of Electrical and Electronics Engineers ;1995vi, 391 pages illustrations ;28 cmBibliographic Level Mode of Issuance: Monograph0-7803-2713-6 Semiconductor industryCongressesSemiconductorsDesign and constructionCongressesProcess controlCongressesSemiconductor industryCongressesSemiconductorsDesign and constructionCongressesProcess controlCongressesInstitute of Electrical and Electronics EngineersSemiconductor Equipment and Materials InternationalIEEE/SEMI Advanced Semiconductor Manufacturing Conference and WorkshopPQKBBOOK996204468903316IEEE878179UNISA