01971oam 2200409zu 450 99620446460331620210807003354.0(CKB)111026746713776(SSID)ssj0000455279(PQKBManifestationID)12212588(PQKBTitleCode)TC0000455279(PQKBWorkID)10398359(PQKB)11192428(NjHacI)99111026746713776(EXLCZ)9911102674671377620160829d1996 uy engur|||||||||||txtccr1996 IEEE International Conference on Microelectronic Test Structures[Place of publication not identified]IEEE19961 online resource (338 pages)Bibliographic Level Mode of Issuance: Monograph0-7803-2783-7 The papers included in this leading international conference examine test structures for microelectronic devices, their recent progress and future directions. Included is a detailed treatment of current developments in silicon and gallium arsenide microelectronic test structure research, implementation, and applications. Also addressed are advances in device characterization, such as increased miniaturization, reduced operating voltages and reduced power requirements through improved measurement and test techniques. Topics highlighted include: Process Characterization, Dimensional Measurements, Interconnection, SOI & Material Characterization, Reliability, Device Characterization, Capacitance Measurements, Statistics.Integrated circuitsCongressesMicroelectronicsCongressesIntegrated circuitsMicroelectronics621.3815PQKBBOOK9962044646033161996 IEEE International Conference on Microelectronic Test Structures2506547UNISA