02043oam 2200493zu 450 99620445580331620210807003349.0(CKB)111026746713848(SSID)ssj0000455260(PQKBManifestationID)12193816(PQKBTitleCode)TC0000455260(PQKBWorkID)10398254(PQKB)10294447(EXLCZ)9911102674671384820160829d1996 uy engtxtccrIEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 1996[Place of publication not identified]Institute of Electrical and Electronics Engineers1996Bibliographic Level Mode of Issuance: Monograph0-7803-2985-6 Electromechanical devicesCongressesMicroelectronicsCongressesDetectorsCongressesActuatorsCongressesElectrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCElectromechanical devicesCongressesMicroelectronicsCongressesDetectorsCongressesActuatorsCongressesElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied SciencesIEEE Robotics and Automation SocietyIEEE Workshop on Micro Electro Mechanical SystemsPQKBBOOK996204455803316IEEE the Ninth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines, and systems : proceedings, San Diego, California, USA, February 11-15, 19962509856UNISA