00934nas 2200313-a 450 99620425810331620180406071904.51882-4749(OCoLC)10468028(CKB)1000000000390045(CONSER)sn-84001202-(EXLCZ)99100000000039004519840228b1958201u --r djpnJournal of the Vacuum Society of JapanTōkyō-to Nihon Shinkū Kyōkai1882-2398 Journal of the Vacuum Society of JapanShinkūVacuum technologyPeriodicalsVacuum technologyfast(OCoLC)fst01163626Periodicals.fastVacuum technologyVacuum technology.Nihon Shinkū Kyōkai.JOURNAL996204258103316Journal of the Vacuum Society of Japan2104706UNISA