01245oam 2200385zu 450 99620423510331620210806235829.01-5090-9877-1(CKB)1000000000022651(SSID)ssj0000453723(PQKBManifestationID)12167354(PQKBTitleCode)TC0000453723(PQKBWorkID)10498181(PQKB)10056238(NjHacI)991000000000022651(EXLCZ)99100000000002265120160829d2005 uy engur|||||||||||txtccr2005 IEEE International Symposium on Semiconductor Manufacturing[Place of publication not identified]I E E E20051 online resource (xvi, 498 pages) illustrationsBibliographic Level Mode of Issuance: Monograph0-7803-9143-8 Computer integrated manufacturing systemsCongressesComputer integrated manufacturing systems670.285PQKBPROCEEDING9962042351033162005 IEEE International Symposium on Semiconductor Manufacturing2496041UNISA