01834oam 2200481zu 450 99620371180331620210807003352.0(CKB)111026746716042(SSID)ssj0000455331(PQKBManifestationID)12193822(PQKBTitleCode)TC0000455331(PQKBWorkID)10400021(PQKB)11139143(EXLCZ)9911102674671604220160829d1996 uy engtxtccrIon implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 1996[Place of publication not identified]Institute of Electrical and Electronics Engineers1996Bibliographic Level Mode of Issuance: Monograph0-7803-3289-X SemiconductorsCongressesIon implantationCongressesSemiconductor dopingCongressesElectrical & Computer EngineeringHILCCElectrical EngineeringHILCCEngineering & Applied SciencesHILCCSemiconductorsCongressesIon implantationCongressesSemiconductor dopingCongressesElectrical & Computer EngineeringElectrical EngineeringEngineering & Applied Sciences621.3815/2Ishida EmiInternational Conference on Ion Implantation TechnologyPQKBBOOK996203711803316Ion implantation technology--96 : proceedings of the Eleventh International Conference on Ion Implantation Technology, Austin, Texas, USA, June 16-21, 19962545678UNISA