01026oam 2200313zu 450 99620370010331620210807003355.0(CKB)111026746717178(SSID)ssj0000455300(PQKBManifestationID)12193820(PQKBTitleCode)TC0000455300(PQKBWorkID)10399456(PQKB)11281226(EXLCZ)9911102674671717820160829d1996 uy engtxtccr1996 IEEE 9th International Vacuum Microelectronics Conference Technical Digest[Place of publication not identified]IEEE1996Bibliographic Level Mode of Issuance: Monograph0-7803-3594-5 IEEE, Institute of Electrical and Electronics Engineers, Inc. StaffPQKBBOOK9962037001033161996 IEEE 9th International Vacuum Microelectronics Conference Technical Digest2514395UNISA