01145nam 2200361 450 99620302420331620180306112813.0(CKB)2400000000002618(WaSeSS)IndRDA00093534(EXLCZ)99240000000000261820180306d2009 || |engur|||||||||||txtrdacontentcrdamediacrrdacarrier2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 9-11 April 2008New York :IEEE,2009.1 online resource (392 pages)Includes index.2-35500-006-9 Microelectronic packagingCongressesMicroelectromechanical systemsCongressesMicromachiningCongressesMicroelectronic packagingMicroelectromechanical systemsMicromachiningWaSeSSWaSeSSPROCEEDING9962030242033162008 Symposium on Design, Test, Integration and Packaging of MEMS2533831UNISA