01614nam 2200469 450 99620248310331620230617015153.0(CKB)1000000000022067(SSID)ssj0000396693(PQKBManifestationID)12146172(PQKBTitleCode)TC0000396693(PQKBWorkID)10342509(PQKB)10150616(WaSeSS)IndRDA00124280(EXLCZ)99100000000002206720200601d2003 uy 0engur|||||||||||txtccr12th International Conference on Solid-State Sensors, Actuators and Microsystems 8-12 June 2003, Boston, MA, USA /IEEE Electron Devices SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,2003.1 online resource (253 pages)"Digest of Technical Papers Catalog Number 03TH8664."0-7803-7731-1 v. 1. Papers 1A1.1-2E136.P -- v. 2. Papers 3A1.1-4D3.5.TransducersCongressesDetectorsCongressesActuatorsCongressesTransducersDetectorsActuators681.2IEEE Electron Devices Society,International Conference on Solid-State Sensors and ActuatorsWaSeSSWaSeSSPROCEEDING99620248310331612th International Conference on Solid-State Sensors, Actuators and Microsystems2545660UNISA