01591oam 2200457zu 450 99620246890331620210806235946.0(CKB)1000000000022104(SSID)ssj0000395980(PQKBManifestationID)12189677(PQKBTitleCode)TC0000395980(PQKBWorkID)10461274(PQKB)11226525(EXLCZ)99100000000002210420160829d2003 uy engtxtccr2003 IEEE/LEOS International Conference on Optical MEMs : 18-21 August, 2003, Waikoloa Beach Marroitt an Outrigger Resort, Waikoloa, Hawaii[Place of publication not identified]IEEE2003Bibliographic Level Mode of Issuance: Monograph0-7803-7830-X Microelectromechanical systemsCongressesOptical MEMSCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsOptical MEMSElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621.36Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)International Conference on Optical MEMSPQKBPROCEEDING9962024689033162003 IEEE1945350UNISA