02028oam 2200577zu 450 99620176040331620210807002626.01-5090-9427-X(CKB)1000000000331464(SSID)ssj0000395450(PQKBManifestationID)12122316(PQKBTitleCode)TC0000395450(PQKBWorkID)10454137(PQKB)10587253(EXLCZ)99100000000033146420160829d2006 uy engtxtccrThe 2006 International Conference on MEMS, NANO, and Smart Systems : December 27-29, 2006, Cairo, Egypt : proceedings[Place of publication not identified]IEEE2006Bibliographic Level Mode of Issuance: Monograph1-4244-0899-7 Microelectromechanical systemsCongressesNanotechnologyCongressesSystems on a chipCongressesIntelligent control systemsCongressesSmart materialsCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCMicroelectromechanical systemsNanotechnologySystems on a chipIntelligent control systemsSmart materialsElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering621Badawy WaelSalem AshrafUniversity of CalgaryIEEE Circuits and Systems SocietyInternational Conference on MEMS, NANO, and Smart SystemsPQKBPROCEEDING996201760403316The 2006 International Conference on MEMS, NANO, and Smart Systems : December 27-29, 2006, Cairo, Egypt : proceedings2544173UNISA