01914oam 2200493zu 450 99620040710331620210807003215.0(CKB)1000000000695878(SSID)ssj0000395512(PQKBManifestationID)12144170(PQKBTitleCode)TC0000395512(PQKBWorkID)10467863(PQKB)11365662(EXLCZ)99100000000069587820160829d2007 uy engtxtccrDigest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan[Place of publication not identified]Japan Society of Applied Physics2007Bibliographic Level Mode of Issuance: Monograph4-9902472-4-8 NanotechnologyCongressesMicroelectronicsCongressesMicrolithographyCongressesElectrical & Computer EngineeringHILCCEngineering & Applied SciencesHILCCElectrical EngineeringHILCCNanotechnologyMicroelectronicsMicrolithographyElectrical & Computer EngineeringEngineering & Applied SciencesElectrical Engineering620/.5IEEE Electron Devices SocietyOyo Butsuri GakkaiInternational Microprocesses and Nanotechnology ConferencePQKBPROCEEDING996200407103316Digest of papers : Microprocesses and nanotechnology 2007 : 2007 International Microprocesses and Nanotechnology Conference, November 5-8, 2007, Koyto International Conference Center, Kyoto, Japan2513182UNISA