01275nam 2200373 450 99620024100331620230331015623.0(CKB)111055184270166(WaSeSS)IndRDA00124281(EXLCZ)9911105518427016620200601d1991 uy 0engur|||||||||||txtrdacontentcrdamediacrrdacarrier1991 International Conference on Solid-State Sensors and Actuators digest of technical papers : 24-27 June 1991, San Francisco, CA, USA /Institute of Electrical and Electronics EngineersPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,1991.1 online resource (111 pages)0-87942-585-7 TransducersCongressesDetectorsCongressesActuatorsCongressesTransducersDetectorsActuators681.2Institute of Electrical and Electronics Engineers,WaSeSSWaSeSSBOOK9962002410033161991 International Conference on Solid-State Sensors and Actuators2498239UNISA