01843nam 2200481 450 99619996410331620230421041147.0(CKB)111026746754386(SSID)ssj0000395505(PQKBManifestationID)12085000(PQKBTitleCode)TC0000395505(PQKBWorkID)10450601(PQKB)11517066(WaSeSS)IndRDA00123470(EXLCZ)9911102674675438620200526d1998 uy 0engur|||||||||||txtccrDigest of papers Microprocesses and Nanotechnology '98 : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea /sponsored by the Japan Society of Applied Physics, the Korean Vacuum Society ; technical cosponsored by IEEE Electron Device SocietyPiscataway, New Jersey :Institute of Electrical and Electronics Engineers,1998.1 online resource (352 pages)Bibliographic Level Mode of Issuance: Monograph4-930813-83-2 Integrated circuitsVery large scale integrationDesign and constructionCongressesNanotechnologyCongresseMicroelectronicsCongressesIntegrated circuitsVery large scale integrationDesign and constructionNanotechnologyMicroelectronics621.395Ōyō Butsuri Gakkai,Korean Vacuum Society,IEEE Electron Devices Society,International Microprocesses and Nanotechnology ConferenceWaSeSSWaSeSSPROCEEDING996199964103316Digest of papers1886461UNISA